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Rysbaev A.S., Irgashev S.U., Kasimov A.S., Juraeva D.Sh., Khujaniyazov J.B., Khudoyberdieva M.I. Optimal technological modes of ion implantation and following annealing for forming thin nanosized films of silicides. Eurasian Journal of Physics and Functional Materials. 2020;4(1):50-60. https://doi.org/10.29317/ejpfm.2020040106

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ISSN 2522-9869 (Print)
ISSN 2616-8537 (Online)