Uzakbaiuly B..., Mukanova A..., Kurmabbayeva I..., Bakenov Z.B. Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON). Eurasian Journal of Physics and Functional Materials. 2019;3(2):174-182. https://doi.org/10.29317/ejpfm.2019030209
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Email the author (Login required) Deputy Editor-In-Chief:
Asset Kabyshev
L.N. Gumilyov Eurasian National University, Astana, Kazakhstan.
e-mail: assetenu@gmail.com
