Bakenov, Z. B., National Laboratory Astana, Kazakhstan
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Vol 3, No 2 (2019) - Статьи
Optimization of deposition parameters for thin film lithium phosphorus oxynitride (LIPON)
Abstract PDF (Eng)
ISSN 2522-9869 (Print)
ISSN 2616-8537 (Online)
ISSN 2616-8537 (Online)
